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Meter: IL1700 Research Radiometer
Detector: SED033/A/W
Dynamic Range: 2 x 10-9 to 1.0 W/cm2
Spectral Range: 320 to 475 nm
Meter: IL1400A Radiometer / PhotometerThe IL1440-A Photoresist Radiometer system was designed for direct measurement of the UV and blue visible irradiance used for exposing photoresist coated substrates in test and production environments. The low profile (12.5 mm high) XRL probe can be placed right inside most exposure systems.
Detector: XRL140A (XRL340A = 1/10 sensitivity)
Dynamic Range: 30 nW/cm2 to 100 mW/cm2
Spectral Range: 320 to 475 nm
The IL1740-A System provides unmatched versatility and power for photoresist research. Interchangeable filters and multiple sensitivity factors, as well as a variety of I/O options, makes this system ideal for researchers and development engineers of photoresist equipment. Both systems offer autoranging during exposure integration.
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Meter: IL1700 Research Radiometer
Detector: SED033/B/W
Dynamic Range: 2 x 10-9 to 1.0 W/cm2
Spectral Range: 326 to 401 nm
Meter: IL1400A Radiometer / PhotometerThe IL1440-B and IL1740-B Photoresist Radiometer systems employ UV filtering designed specifically for photoresist applications requiring a peak sensitivity in the UVA and subdued response in the blue. The 'B' response is also useful for isolating the 365 nm mercury line. Consult your photoresist manufacturer to determine whether the 'A' or 'B' response is appropriate for your application.
Detector: XRL140B (XRL340B = 1/10 sensitivity)
Dynamic Range: 30 nW/cm2 to 250 mW/cm2
Spectral Range: 326 to 401 nm
International Light is the only manufacturer to offer radiometers that autorange during exposure integrations. Our proprietary floating current-to-current amplification technology permits autoranging without any gain changes, for real-time integration without data loss.
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Meter: IL1700 Research Radiometer
Detector: SSD001A Super Slim UV probe
Dynamic Range: 3 x 10-9 to 1.0 W/cm2
Spectral Range: 260 to 400 nm, 370 peak
Meter: IL1400A Radiometer / PhotometerThe IL1741 and IL1441 Photoresist Radiometer systems include the new "Super Slim" UV Probe, for use in very low profile applications, such as printed circuit board and printing plate exposure assemblies. The probe is a mere 2 mm thick, the thickness of a printed circuit board.
Detector: SSL001A Super Slim UV probe
Dynamic Range: 300 nW/cm2 to 0.9 W/cm2
Spectral Range: 260 to 400 nm, 370 peak
The "Super Slim" probe offers broad UV sensitivity from 260 nm to 400 nm. Since Mylar and glass do not transmit UV below 320 nm, the use of these materials in vacuum chambers blocks UVB, creating an effective spectral response quite similar to the IL1740-B response. Also available is the SSD(SSL)001B, offering a deep UV response.
